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Deep UV


Deep UV pellicle / Film 602 (Deep-UV, 248nm, i-line)
As an innovative leader, MLI has been producing deep-UV pellicles since 1991 to meet customer requirements. MLI utilizes a unique patented laser melt process to mount the film onto the pellicle frame. Long-lasting fluoro-polymer deep-UV and i-line pellicles for ASM, Canon, Nikon, and SVGL steppers have been produced.

Deep UV film
Transmission: minimum 99% @ 248nm and 365nm wavelength

Transmission and Wavelength